Vacuum Chamber - for sale, with option to be customized - SOLD
Vacuum chamber: Internal dimensions 17"Wx17"Dx34"H (all sides are 0.75" thick electropolished SS304)
Leybold D25B Trivac Rotary Vane Dual Stage Vacuum Pump
CTI Cryo-Torr 8 High Vacuum Pump with 8200 Compressor
VAT Series 64 8" Gate Valve with PM-5 Adaptive Pressure Controller
Granville-Phillips Series 316 Vacuum Gauge Controller
Granville-Phillips Series 358 Micro-Ion Vacuum Gauge Controller
Glassman High Voltage EQ Series 1200 Watt (+/- 6.0kV, 200mA) Glow Discharge
Stanford Research Systems RGA 100 Residual Gas Analyzer
Tol-O-Matic MSD Micro Stepping Drive (2x)
Galeb Optics GOC-10 PhaseCODE Film Thickness Controller
Balzers GSM 420 Optical Monitor
Balzers QSK 621 6-Crystal Holder with Controller
Linearly Driven 3 Resistive Sources with Eurothetm TE10A Thyristor Power Controller
Pneumatic Deposition Source Shutter
Linearly Driven Substrate Holder
Linearly Driven Substrate Holder
Overall system dimensions: 60"Wx40"Dx84"H
